Atomic layer deposition of nanostructured materials / (Record no. 21046)

MARC details
000 -LEADER
fixed length control field 03716cam a2200601Ka 4500
001 - CONTROL NUMBER
control field ocn773300979
003 - CONTROL NUMBER IDENTIFIER
control field OCoLC
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20220701010936.0
006 - FIXED-LENGTH DATA ELEMENTS--ADDITIONAL MATERIAL CHARACTERISTICS--GENERAL INFORMATION
fixed length control field m o d
007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION
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008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 120119s2011 gw ob 001 0 eng d
040 ## - CATALOGING SOURCE
Original cataloging agency DG1
Language of cataloging eng
Description conventions pn
Transcribing agency DG1
Modifying agency YDXCP
-- OCLCO
-- OCLCQ
-- OCLCF
-- OCLCA
-- EBLCP
-- MEU
-- N$T
-- DEBSZ
-- E7B
-- IDEBK
-- OCLCQ
-- COO
-- OCLCQ
019 ## -
-- 849922525
-- 908041352
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
ISBN 9783527639915
Qualifying information (electronic bk.)
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
ISBN 3527639918
Qualifying information (electronic bk.)
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
ISBN 9783527639939
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
ISBN 3527639934
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
ISBN 9783527639922
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
ISBN 3527639926
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
Cancelled/invalid ISBN 9783527327973
029 1# - (OCLC)
OCLC library identifier AU@
System control number 000049641677
029 1# - (OCLC)
OCLC library identifier DEBSZ
System control number 431658609
029 1# - (OCLC)
OCLC library identifier GBVCP
System control number 790035332
029 1# - (OCLC)
OCLC library identifier NZ1
System control number 14214512
029 1# - (OCLC)
OCLC library identifier NZ1
System control number 15340704
035 ## - SYSTEM CONTROL NUMBER
System control number (OCoLC)773300979
Canceled/invalid control number (OCoLC)849922525
-- (OCoLC)908041352
037 ## - SOURCE OF ACQUISITION
Stock number 10.1002/9783527639915
Source of stock number/acquisition Wiley InterScience
Note http://www3.interscience.wiley.com
050 #4 - LIBRARY OF CONGRESS CALL NUMBER
Classification number TS695
Item number .A86 2011
072 #7 - SUBJECT CATEGORY CODE
Subject category code TEC
Subject category code subdivision 009070
Source bisacsh
082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.38152
Edition number 22
049 ## - LOCAL HOLDINGS (OCLC)
Holding library MAIN
245 00 - TITLE STATEMENT
Title Atomic layer deposition of nanostructured materials /
Statement of responsibility, etc edited by Nicola Pinna, Mato Knez.
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Place of publication, distribution, etc Weinheim :
Name of publisher, distributor, etc Wiley-VCH ;
Place of publication, distribution, etc Chichester :
Name of publisher, distributor, etc John Wiley [distributor],
Date of publication, distribution, etc 2011.
300 ## - PHYSICAL DESCRIPTION
Extent 1 online resource (1 volume)
336 ## -
-- text
-- txt
-- rdacontent
337 ## -
-- computer
-- c
-- rdamedia
338 ## -
-- online resource
-- cr
-- rdacarrier
505 0# - FORMATTED CONTENTS NOTE
Formatted contents note Front Matter -- Introduction to ALD. Theoretical Modeling of ALD Processes / Charles B Musgrave -- Step Coverage in ALD / Sovan Kumar Panda, Hyunjung Shin -- Precursors for ALD Processes / Matti Putkonen -- Sol₆Gel Chemistry and Atomic Layer Deposition / Guylhaine Clavel, Catherine Marichy, Nicola Pinna -- Molecular Layer Deposition of Hybrid Organic₆Inorganic Films / Steven M George, Byunghoon Yoon, Robert A Hall, Aziz I Abdulagatov, Zachary M Gibbs, Younghee Lee, Dragos Seghete, Byoung H Lee -- Low-Temperature Atomic Layer Deposition / Jens Meyer, Thomas Riedl -- Plasma Atomic Layer Deposition / Erwin Kessels, Harald Profijt, Stephen Potts, Richard van de Sanden -- Nanostructures by ALD. Atomic Layer Deposition for Microelectronic Applications / Cheol Seong Hwang -- Nanopatterning by Area-Selective Atomic Layer Deposition / Han-Bo-Ram Lee, Stacey F Bent -- Coatings on High Aspect Ratio Structures / Jeffrey W Elam -- Coatings of Nanoparticles and Nanowires / Hong Jin Fan, Kornelius Nielsch -- Atomic Layer Deposition on Soft Materials / Gregory N Parsons -- Application of ALD to Biomaterials and Biocompatible Coatings / Mato Knez -- Coating of Carbon Nanotubes / Catherine Marichy, Andrea Pucci, Marc-Georg Willinger, Nicola Pinna -- Inverse Opal Photonics / Davy P Gaillot, Christopher J Summers -- Nanolaminates / Adriana V Szeghalmi, Mato Knez -- Challenges in Atomic Layer Deposition / Markku Leskel̃ -- Index.
588 0# -
-- Print version record.
504 ## - BIBLIOGRAPHY, ETC. NOTE
Bibliography, etc Includes bibliographical references and index.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Chemical vapor deposition.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Nanostructured materials.
650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element TECHNOLOGY & ENGINEERING
General subdivision Mechanical.
Source of heading or term bisacsh
650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Chemical vapor deposition.
Source of heading or term fast
-- (OCoLC)fst00853229
650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Nanostructured materials.
Source of heading or term fast
-- (OCoLC)fst01032630
655 #4 - INDEX TERM--GENRE/FORM
Genre/form data or focus term Electronic books.
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Pinna, Nicola.
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Knez, Mato.
710 2# - ADDED ENTRY--CORPORATE NAME
Corporate name or jurisdiction name as entry element Wiley InterScience (Online service)
776 08 - ADDITIONAL PHYSICAL FORM ENTRY
Display text Print version:
Title Atomic layer deposition of nanostructured materials.
Place, publisher, and date of publication Weinheim : Wiley-VCH ; Chichester : John Wiley [distributor], 2011
International Standard Book Number 9783527327973
Record control number (OCoLC)751804738
856 40 - ELECTRONIC LOCATION AND ACCESS
Uniform Resource Identifier <a href="http://dx.doi.org/10.1002/9783527639915">http://dx.doi.org/10.1002/9783527639915</a>
Public note Wiley Online Library
994 ## -
-- 92
-- DG1

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