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A practical guide to optical metrology for thin films / Michael Quinten.
Material type:
TextPublication details: Weinheim : Chichester : Wiley-VCH ; John Wiley [distributor], 2012. Description: 1 online resource : illustrationsContent type: text Media type: computer Carrier type: online resourceISBN: 9783527664344; 3527664343; 9783527664351; 3527664351; 9781299475991; 129947599X; 9783527664375; 3527664378Subject(s): Thin films -- Optical properties | SCIENCE -- Energy | SCIENCE -- Mechanics -- General | SCIENCE -- Physics -- General | Thin films -- Optical propertiesGenre/Form: Electronic books.Additional physical formats: Print version:: Practical guide to optical metrology for thin films.DDC classification: 530.4/275 LOC classification: QC176.84.O7 | Q56 2012Online resources: Wiley Online Library Includes bibliographical references and index.
Print version record.
A one-stop, concise guide on determining and measuring thin film thickness by optical methods. This practical book covers the laws of electromagnetic radiation and interaction of light with matter, as well as the theory and practice of thickness measurement, and modern applications. In so doing, it shows the capabilities and opportunities of optical thickness determination and discusses the strengths and weaknesses of measurement devices along with their evaluation methods. Following an introduction to the topic, Chapter 2 presents the basics of the propagation of light and other electromag.
Cover; Related Titles; Title Page; Copyright; Dedication; Preface; Chapter 1: Introduction; Chapter 2: Propagation of Light and Other Electromagnetic Waves; 2.1 Properties of Electromagnetic Waves; 2.2 Huygens-Fresnel Principle; 2.3 Interference of Electromagnetic Waves; 2.4 Reflection and Refraction; 2.5 Diffraction; 2.6 Scattering; 2.7 Dielectric Function and Refractive Index; Chapter 3: Spectral Reflectance and Transmittance of a Layer Stack; 3.1 Reflectance and Transmittance of a Single Layer; 3.2 Propagating Wave Model for a Layer Stack; Chapter 4: The Optical Measurement.
7.7 Measurement of Critical DimensionsNumerics with Complex Numbers; A.1 Addition; A.2 Multiplication; A.3 Modulus; A.4 Division; A.5 Power n; A.6 Logarithm; A.7 Exponentiation; A.8 Trigonometric Functions; Fourier Transform; B.1 Linearity; B.2 Scaling; B.3 Shifting; B.4 Damping; B.5 Convolution; B.6 Plancherel Theorem and Parseval's Theorem; Levenberg-Marquardt Algorithm; Downhill Simplex Algorithm; References; Index.
Physical Science